MEMS Strain Gauge
- Designed to deliver dual output
- Ideal for aerospace applications
- Can distinguish between pure and bending strain
- Fabricated using CMOS and bulk silicon micromachining technology
- Low cost in batch fabrication
Comparison of Operational Signal Between Analatom Inc. MEMS Strain Gauge and Standard Metal Foil Device
| Si MEMS Strain Gauge |
Metal Foil Strain Gauge |
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| R1 = 10,000W = R2, R3, R4 |
R1 = 300W = R2, R3, R4 |
| Gauge factor ~2.5 for all Rs |
Gauge factor ~2 for R1 only |
| Let Vin = 1Volt |
Let Vin = 1Volt |
| Thus power = 100 mW |
Thus power = 3300 mW |
| At 1000 mE tension |
At 1000 mE tension |
| R1 = R4 = 9975 |
R1 = 300.6 |
| R2 = R3 = 10025 |
R2 = R3 = R4 = 300 |
| Signal is V = 2.5mV |
Signal is V = -0.4995mV |
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Strain Gauge Fatigue, Loading and Vibration Test Demonstration Detection Crack
Laboratory Fatigue Loading and Vibration Test
Fabrications
- Uses standard MEMS & CMOS process.
- Finished device is 150mm thick.
- Device is mounted onto Flexicircuit to make system node
- Node can measure Compliancy, corrosion, simple strain, temperature, humidity…
  
(*) Not yet released.
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